Monarch 25

The Monarch25 25-wafer batch process module is designed for medium to high volume HF release etch production applications in either the Primaxx® fxP or Primaxx® c2L configurations.

  Key Benefits

• High throughput, high uptime 25-wafer batch processing
• Process chamber, gas/liquid panel, and pressure/vacuum components, all within a small footprint
• Extensive process control and monitoring functions ensure the yield, reliability and repeatability required in volume production

Available configurations:

• c2L supports up to 3 process modules
• fxP supports up to 6 process modules
• Versalis capability enables other SPTS modules to be added to either platform if required